Equipment Summary
| Instruments | Model | Resolution, Source | |
|---|---|---|---|
| TEM | Hitachi 8100 | 0.24 nm, LaB6 |
|
| HIM | He Ion Microscope | 1 nm, He field emission | |
| Sample Preparation |
|||
| Coaters | Au sputtering | ||
| Cutters | ultrasonic disc | ||
| Thinning | Fischione dimpler | Fischione Ar ion miller | |
| Cleaning | Fischione Ar/O2 plasma | ||
